Use of SCHMITT Pumps in Semiconductor Manufacturing
Application Background
Semiconductor fabs handle ultrapure water, acids, alkalis, cleaning fluids and process wastewater. Requirements range from robust facility circuits to highly sensitive processes close to the wafer.
Application and purity level must be clearly defined before selecting the pump. Chemical resistance alone is not sufficient for wafer-critical processes.
Challenge
In sensitive processes, relevant criteria include particle generation, metal ions, extractables and leachables, surface condition, and the assembly, cleaning and qualification concepts. CMP fluids impose different requirements from UPW or clear wet chemicals.
Solution
NHM and MPN are suitable for qualified high-purity, deionized-water, ultrapure-water and wet-chemical auxiliary processes. The T series has no wetted bearings or mechanical seal and therefore prevents bearing wear particles from entering the pumped fluid.
For larger chemical transfer and facility duties, the PFA-lined NEOCHEM CORE is available. Wafer-critical UPW, lithography, etch, CMP and chemical-delivery processes are qualified exclusively on a project-specific basis.
Advantages of SCHMITT Pumps in Semiconductor Manufacturing
PP, PVDF and PFA for suitable etching, cleaning and process fluids.
High sealing integrity without dynamic shaft penetration.
Deionized water, ultrapure water and sensitive fluids are qualified according to the specific purity requirements.
Cantilever design without wetted intermediate bearings or a mechanical seal.
From compact MPN/NHM designs to the PFA-lined NEOCHEM CORE.
Proven sliding-shaft technology in the corresponding horizontal mag-drive pumps.
Pumps for Semiconductor Manufacturing (Selection)
- Hermetically sealed, magnetic coupling, PP or PVDF
- Up to 95 °C, flow rate up to 42 m³/h, head up to 27 m
- Up to 76% efficiency: best-in-class energy efficiency
- Sliding shaft technology: wear-free, maintenance-free and durable
- Hermetically sealed by contactless magnetic drive
- Special containment shell geometry for high pressures and temperatures
- Hermetically sealed, magnetic drive, PP or PVDF
- Up to 95 °C, flow rate up to 35 m³/h, head up to 32 m
- Extremely proven pump, used in more than 10,000 applications
- Insensitive to insufficient lubrication and partial dry running due to generously dimensioned plain bearings – no plug-in shaft
- Virtually maintenance-free in normal operation due to generously dimensioned plain bearings
