High-purity silicon is the most important raw material for manufacturing microelectronic components such as ICs, microprocessors and memory chips. SCHMITT pumps are used here as early as the production of raw silicon. They are also used in etching and rinsing processes in the production of wafers from grown monocrystalline silicon crystals.

The sometimes aggressive fluids required in the subsequent manufacturing process for microchips, including for metallisation, developing, etching and cleaning, are also safely conveyed, circulated and sent for treatment by SCHMITT pumps.

The pumps must not cause any contamination of the fluids. Absolute purity is essential for process stability.
Another application in the semiconductor industry: SCHMITT pumps also convey the cleaning fluid for thermal scrubbers, which clean exhaust gases generated during chip production.

• Production of high-purity polysilicon
• Cleaning and etching of monocrystalline wafers 

• Wet chemical processes: developing, spray etching, immersion etching, rinsing
• Feeding spent liquids for treatment

Centrifugal pumps are an essential component of wet-chemical systems in the semiconductor and solar industries, as they convey process fluids continuously and evenly. Schmitt centrifugal pumps are specially designed for use with high-purity, aggressive and sensitive fluids and meet the stringent requirements of these sectors.

A key advantage is the uniform, low-pulsation flow rate. This ensures stable process conditions, for example in etching processes, cleaning sequences or chemical deposition. At the same time, the robust, low-maintenance design ensures reliable operation in systems with high availability requirements.

For particularly critical applications, magnetic drive pumps are available that operate hermetically sealed, thereby minimising the risk of leakage and contamination. In addition, sealless or specially designed pump solutions enable safe use in open systems and process baths.

Thanks to their high chemical resistance, purity and adaptability, Schmitt centrifugal pumps can be optimally integrated into complex production lines – from ultrapure water treatment and wet-chemical process steps through to the continuous circulation of process fluids in semiconductor and solar cell production.